1. Particle caught on running section of the vacuum pump.
If particles get caught, vacuum pump will be overloaded, causing the pump thermal to trip.
Before starting work, please turn the primary power and power breaker off.
Check the vacuum pump to see if there are no noises or vibrations.
If there is either noise or vibrations, there is a problem with the vacuum pump. Please replace the pump or check with your local Matsui service office.